Ubushyuhe bwikora nubushyuhe bwo kugenzura

Ubushyuhe n'ubushuhe bw'icyumba gisukuye bigenwa cyane cyane hakurikijwe ibisabwa, ariko mugihe ibisabwa byujujwe, ihumure ryabantu rigomba kwitabwaho.Hamwe no kwiyongera kw'ibisabwa kugira isuku yo mu kirere, hari icyerekezo ko inzira ifite byinshi kandi bikenewe cyane kubushyuhe n'ubushuhe.

Nkuko gutunganya neza bigenda neza kandi neza, ibisabwa kugirango ihindagurika ryubushyuhe rigenda riba rito.Kurugero, mugikorwa cya lithographie yerekana ibikorwa binini byuzuzanya byumuzunguruko, itandukaniro riri hagati yubushyuhe bwo kwagura amashyuza yikirahure na silicon wafer nkibikoresho bya diafragma bisabwa kuba bito kandi bito.Wafer ya silicon ifite diameter ya 100μm bizatera kwaguka kumurongo wa 0,24 mm mugihe ubushyuhe buzamutse kuri dogere 1.Kubwibyo, igomba kugira ubushyuhe buhoraho bwa dogere 0.1.Muri icyo gihe, agaciro k'ubushuhe muri rusange gasabwa kuba muke, kubera ko nyuma yuko umuntu abize ibyuya, ibicuruzwa bizaba byanduye, cyane cyane Ku mahugurwa ya semiconductor atinya sodium, ubu bwoko bwamahugurwa asukuye ntibugomba kurenga dogere 25.

Ubushuhe bukabije butera ibibazo byinshi.Iyo ubuhehere bugereranije burenze 55%, ubukonje buzabera ku rukuta rw'umuyoboro ukonje.Niba bibaye mubikoresho bisobanutse neza cyangwa bizunguruka, bizatera impanuka zitandukanye.Biroroshye kubora mugihe ugereranije nubushuhe ni 50%.Byongeye kandi, iyo ubuhehere buri hejuru cyane, umukungugu uri hejuru ya wafer wa silicon uzajya wongerwaho imiti na molekile y'amazi yo mu kirere hejuru, bigoye kuyikuramo.Iyo hejuru ugereranije nubushuhe bugereranije, niko bigorana gukuraho ibifatika, ariko mugihe ubuhehere bugereranije buri munsi ya 30%, ibice nabyo byoroha cyane kubutaka bitewe nigikorwa cyingufu za electrostatike, numubare munini wa semiconductor ibikoresho bikunda gusenyuka.Ubushyuhe bwiza bwo gukora silicon wafer ni 35 ~ 45%.